Chapter 15: A 24 factorial experiment to investigate possible
effects on etch rates.

Col 1: Run number.
Col 2: Effect A (Gap) -1 = 0.8cm, +1 = 1.2cm.
Col 3: Effect B (Pressure) -1 = 450mTorr, +1 = 550mTorr.
Col 4: Effect C (Flow) -1 = 125sccm, +1 = 200sccm.
Col 5: Effect D (Power) -1 = 275 Watts, +1 = 325 Watts.
Col 6: Response (Etch rate in Angstroms per minute).

 1    -1     -1     -1     -1      550
 2     1     -1     -1     -1      669
 3    -1      1     -1     -1      604
 4     1      1     -1     -1      650
 5    -1     -1      1     -1      633
 6     1     -1      1     -1      642
 7    -1      1      1     -1      601
 8     1      1      1     -1      635
 9    -1     -1     -1      1     1037 
10     1     -1     -1      1      749
11    -1      1     -1      1     1052
12     1      1     -1      1      868
13    -1     -1      1      1     1075 
14     1     -1      1      1      860
15    -1      1      1      1     1063 
16     1      1      1      1      729